| abstract |
A deposition apparatus (100) for coating a flexible substrate (10) with a stack of layers is described. The deposition apparatus comprises: a first spool chamber (110) housing a storage spool for providing the flexible substrate; a deposition chamber (120) arranged downstream from the first spool chamber and comprising a coating drum (122) for guiding the flexible substrate past a plurality of deposition units (121); a second spool chamber arranged downstream from the deposition chamber (120) and housing a wind-up spool for winding the flexible substrate thereon after deposition; and a roller assembly configured to transport the flexible substrate (10) along a partially convex and partially concave substrate transportation path from the first spool chamber to the second spool chamber. Further, a method of coating a flexible substrate, particularly with the described deposition apparatus, is described. |