| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_698535b2df71f521ea307a4b4b4de195
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_275795f71e1985b436cdb8f75799b94f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K11-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-21 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K11-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K11-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K11-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K11-18 |
| filingDate |
2018-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50330d436efaa97c77bb79add7612750
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75c7f5b2d188b9a9bfb9e2bfa3000896
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c08faf123bb214d95dc6486e8289c45 |
| publicationDate |
2018-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2018204545-A1 |
| titleOfInvention |
Method for rapid temperature measurement and apparatus thereof |
| abstract |
Method and apparatus for rapid temperature measurement in a small sample area. Using a standard thermometer and spectrometer or ellipsometry, the relationship between temperature and the optical constants of materials such as the reflectivity at plasma frequency or the imaginary part of dielectric constant is determined. By measuring the optical constants of a material during rapid temperature change (such as during material processing) using a spectrometer or ellipsometry, the temperature of the material during rapid thermal processing can be determined based on the above relationship in nanoseconds. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109270000-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020248447-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109270000-A |
| priorityDate |
2017-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |