| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-175
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02228 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2017-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9181496d4030d678df8bfde2374e4240
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dea9221c32483b628fb29d23ce414294
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da3ebb0d56efcc4762867b1212cd9084
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_316253f6352d0bd98047a5e38ce1b127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60a22969db8ab77fc968b98f80a2b7c8 |
| publicationDate |
2018-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2018182707-A1 |
| titleOfInvention |
Devices including acoustic devices isolated using porous spin-on dielectrics, and related methods |
| abstract |
Electronic devices, computing devices, and related methods are disclosed. An electronic device includes an acoustic device on or in a semiconductor structure, and an acoustic isolator including a porous spin-on (PSO) dielectric configured to acoustically isolate the acoustic device from the semiconductor structure. A method includes disposing an acoustic device onto or into a semiconductor structure, spinning a PSO dielectric onto or into the semiconductor structure, and curing the PSO dielectric. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023169209-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111368400-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023020792-A1 |
| priorityDate |
2017-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |