| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-0407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16225 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02102
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02834 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate |
2017-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_316253f6352d0bd98047a5e38ce1b127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da3ebb0d56efcc4762867b1212cd9084
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dea9221c32483b628fb29d23ce414294 |
| publicationDate |
2018-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2018182657-A1 |
| titleOfInvention |
Compensation for temperature coefficient of resonant frequency using atomic layer deposition materials |
| abstract |
Electronic devices, computing devices, and related methods are disclosed. An electronic device includes an acoustic device on or in a semiconductor structure, and a Temperature Coefficient of resonant Frequency (TCF) compensation material disposed proximate to the resonator material and including an Atomic Layer Deposition (ALD) material having a compensating TCF that at least substantially compensates for a TCF of the resonator material. A method includes disposing a resonator material having a TCF onto or into a semiconductor structure, and disposing, using ALD, an ALD material proximate to the resonator material. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022079024-A1 |
| priorityDate |
2017-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |