Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-162 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-101 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0387 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-1071 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-1075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-1067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-1042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-1046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0388 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-037 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-031 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-037 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-10 |
filingDate |
2018-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41a4c349a9504fc151eb61aea309c99f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9fa054498b860c46872afbc2af124599 |
publicationDate |
2018-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2018181182-A1 |
titleOfInvention |
Photosensitive resin composition, cured film, laminate, method for producing cured film, and semiconductor device |
abstract |
Provided are: a photosensitive resin composition which enables the achievement of a cured film that has a small warp after curing, and which exhibits excellent lithographic properties during the formation of a pattern; a cured film; a laminate; a method for producing a cured film; and a semiconductor device. A photosensitive resin composition which contains: a polyimide precursor that contains a repeating unit containing a biphenyl structure; and a photopolymerization initiator that has an oxime structure which is capable of generating an aryl radical upon irradiation of light. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210116541-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020170997-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021099448-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7351896-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102555592-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2020170997-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7078744-B2 |
priorityDate |
2017-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |