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publicationDate 2018-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2018175682-A1
titleOfInvention Surface treatment methods and compositions therefor
abstract The disclosure provides methods and compositions therefor for treating a surface wherein a surface treatment layer is formed on the surface, thereby minimizing or preventing pattern collapse as the surface is subjected to typical cleaning steps in the semiconductor manufacturing process.
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