http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018167923-A1

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filingDate 2017-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_747f3b5c89661bee6c0c6b1f78b63cbf
publicationDate 2018-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2018167923-A1
titleOfInvention Method for manufacturing organic el device, film-forming method, and film-forming apparatus
abstract The film-forming method according to an embodiment of the present invention includes: a step A for forming a photocurable resin liquid film on a substrate; a step B for vaporizing the photocurable resin in a first region on the substrate by selectively irradiating the first region with infrared light or visible light having a wavelength that is longer than 550 nm; and a step C for obtaining a photocured resin film by curing the photocurable resin in the second region on the substrate, said second region including the first region, by irradiating, simultaneously with the step B or after performing the step B, the second region with light, to which the photocurable resin is sensitive.
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