http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018135422-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73d55b44219a84c850812a4488def924 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d610873487d2bc9668c04d7c2ec8e6c |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2018-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bff1eb2a5a97a8a6c6d805e54e92c5a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99421ff7ba55752e05811a23b84aec55 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9348a53153d39fea00aeb094106a0ff4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91b0423fcc7637fb9511c4d5353f8fb1 |
| publicationDate | 2018-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2018135422-A1 |
| titleOfInvention | Vapor-phase growth device |
| abstract | The objective of the present technique is to provide a vapor-phase growth device with which it is possible to observe in situ the state of a semiconductor layer with high precision. A vapor-phase growth device (1000) has a susceptor (210), a reaction chamber (100), a starting material gas introduction opening (310), a gas discharge opening (320), a light emission unit (510) that irradiates electromagnetic waves toward the susceptor (210), and a light reception unit (520) that receives the electromagnetic waves. The angle formed by the plate surface of a substrate (S1) and a line connecting the starting material gas introduction opening (310) with the gas discharge opening (320) is -20° to 20°. The reaction chamber (100) has a reaction chamber top plate (101) that faces the susceptor (210). The reaction chamber top plate (101) has a through-hole (101a). The light emission unit (510) irradiates the electromagnetic waves through the through-hole (101a) toward the susceptor (210). The light reception unit (520) receives the electromagnetic waves that have passed through the through-hole (101a). |
| priorityDate | 2017-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.