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publicationDate 2018-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2018118092-A1
titleOfInvention Advanced lithography and self-assembled devices
abstract Advanced lithography techniques including sub-10nm pitch patterning and structures resulting therefrom are described. Self-assembled devices and their methods of fabrication are described.
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