| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ccfee51074117c6961593015b14f0dd9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-18 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-54 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
2017-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e14ff1e8b59ad3a0b4d799a7676ef2b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f6d146606a8e7f9a90908e8a64b62cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a5e7582cecb8bc14228c2c8e800fbea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_181b74fc6711de7e0b33f3d9f6947997
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b44d09a4d043b2b5eda7b16c21e2d6ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10a678c4a0dfb0740ec50547a6e559f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce09d4afd41fd485090dbd35eba82511 |
| publicationDate |
2018-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2018099835-A1 |
| titleOfInvention |
Carbon-comprising underlayer-forming composition and methods for manufacturing carbon-comprising underlayer and device using the same |
| abstract |
An object is to provide a carbon-comprising underlayer-forming composition having goodcoating formation property and gap filling property. Another object is to provide a method for manufacturing a device using the carbon-comprising underlayer-forming composition. [Solution] Provided are: a carbon-comprising underlayer-forming composition comprising a specific acrylate derivative and a specific organic solvent; a method for manufacturing a carbon-comprising underlayer using the carbon- comprising underlayer-forming composition; and a method for manufacturing a device using the carbon-comprising underlayer-forming composition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021209476-A1 |
| priorityDate |
2016-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |