http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018099112-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_915ca7f075ca68ea8cb675c1f7bf7858 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-426 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate | 2017-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5852284640bd02c69418db5e6f5e0f40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6018569cb21b8d32c2caa33bc77fc29 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4b40a2ce069e50d919bc59ce89be588 |
| publicationDate | 2018-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2018099112-A1 |
| titleOfInvention | Fluorine-containing cleaning liquid |
| abstract | A fluorine-containing cleaning liquid comprising a fluoride, an organic amine, an organic solvent, a hydrated hydrazine, and a derivative thereof. The fluorine-containing cleaning liquid has powerful cleaning capability, effectively removes plasma etching residues in a semiconductor fabrication process, particularly residues after ashing in a copper mask process, provides a reduced corrosion rate with respect to nonmetal materials (such as silicon oxynitride and a low dielectric material) and metal materials (such as Cu) in high-rotational speed single-chip microcomputer cleaning, is applicable in a batch immersion and batch rotating spray cleaning approach, is specifically applicable in a high rotational speed single-chip rotating cleaning approach, solves the shortcoming of copper corrosion inhibition of a conventional cleaning liquid, and has great application prospects in the microelectronics field of semiconductor chip cleaning. |
| priorityDate | 2016-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 145.