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filingDate 2017-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2018-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2018067763-A1
titleOfInvention Cleaning formulations for removing residues on semiconductor substrates
abstract This disclosure relates to a cleaning composition that contains 1) at least one redox agent; 2) at least one organic solvent selected from the group consisting of water soluble alcohols, water soluble ketones, water soluble esters, and water soluble ethers; 3) at least one metal-containing additive; and 4) water.
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