http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018066217-A1

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filingDate 2017-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3fe300ee820e965e8a5ca68b8f842b5c
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publicationDate 2018-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2018066217-A1
titleOfInvention Electroless palladium/gold plating process
abstract The present invention addresses the problem of providing an electroless palladium/gold plating process capable of forming a palladium/gold plating film selectively only on copper even on small single electrodes or narrow L/S wiring without the occurrence of defective palladium deposition. In order to solve said problem, an electroless palladium/gold plating process is characterized in being provided with: a step (S4) for adjusting the copper surface potential by immersing an insulating base material, the surface of which is provided with copper, in an aqueous sulfur-containing solution containing at least one kind of sulfur compound selected from a group consisting of thiosulfate salts and thiols; a step (S5) for performing electroless palladium plating on the insulating base material with adjusted copper surface potential to form a palladium plating film on the copper; and a step (S6) for performing electroless gold plating on the insulating base material in which a palladium plating film has been formed on the copper to form a gold plating film on the palladium plating film.
priorityDate 2016-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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