abstract |
The present invention relates to a surface treatment composition which comprises at least one water-soluble polymer selected from the following group A, at least one anionic surfactant selected from the following group B, and water.nGroup A: water-soluble polysaccharides, poly(vinyl alcohol) and derivatives thereof, and polyvinylpyrrolidone and derivatives thereof (excluding any compounds involved in the group B).nGroup B: compounds having a sulfonic acid (salt) group, compounds having a sulfuric acid ester (salt) group, compounds having a phosphonic acid (salt) group, compounds having a phosphoric acid (salt) group, and compounds having a phosphinic acid (salt) group. The present invention can provide a surface treatment composition with which foreign matter, such as particles and organic residues, remaining on the surface of a polished work can be effectively removed. |