| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-06113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J2003-282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-0638
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-95684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-2803
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-28 |
| filingDate |
2017-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0dbc974c3e30f2962f78bc79c4388453 |
| publicationDate |
2018-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2018048938-A1 |
| titleOfInvention |
Speed enhancement of chromatic confocal metrology |
| abstract |
Systems and methods for height measurements, such as those for bumps, pillars, or film thickness, can use chromatic confocal techniques. The system can include a white light source that emits white light and lenses that vary a focal distance of each wavelength of the white light from the white light source. Each of the wavelengths of the white light focuses at a different distance from the lenses. A sensor body has multiple sensors that are disposed in the sensor body in multiple rows and columns. Each of the rows and the columns has at least two of the sensors. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022108723-A1 |
| priorityDate |
2016-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |