| abstract |
Described herein are structures that include Josephson Junctions (JJs) to be used in quantum circuits. An exemplary method for fabricating JJs includes providing a stack of a base superconductive (SC) wire layer, a junction base SC layer, and a junction tunnel barrier layer, and providing an opening through the stack. The method also includes filling the opening with a sacrificial material, and providing a top SC wire layer patterned to form a bridge over the opening and a window for removal of the sacrificial material under the bridge. The method further includes patterning the stack to form the JJ and an interconnect portion, separated from one another by the opening, and removing the sacrificial material through the window to provide a gap between the JJ and the interconnect portion. Such a method advantageously allows producing high performance JJs and can be efficiently used in large-scale manufacturing. |