| abstract |
A structure usable in a molecular sensor device comprises a substrate defining a substrate plane, and spaced apart pairs of electrode sheets attached to the substrate at an angle to the substrate plane. The structure further includes an inner dielectric sheet between each electrode sheet in each pair of electrode sheets, and an outer dielectric sheet between each pair of electrode sheets. Further disclosed are fabrication methods for manufacturing structures for molecular sensors comprising oblique angle deposition of electrode and dielectric layers, planarization of the resulting stack, and removal of an end portion of each inner dielectric sheet to form a groove therein. |