http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018017684-A1

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publicationDate 2018-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2018017684-A1
titleOfInvention Deposition of flowable silicon-containing films
abstract Methods for seam-less gapfill comprising forming a flowable film by exposing a substrate surface to a silicon-containing precursor and a co-reactant are described. The silicon-containing precursor has at least one akenyl or alkynyl group. The flowable film can be cured by any suitable curing process to form a seam-less gapfill.
priorityDate 2016-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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