| abstract |
A multi-layer coating for a surface of an article comprising a diffusion barrier layer and an erosion resistant layer. The diffusion barrier layer may be a nitride film including but not limited to TiN x , TaN x , Zr 3 N 4 , and TiZr x N y . The erosion resistant layer may be a rare oxide film including but not limited to YF 3 , Y 2 O 3 , Er 2 O 3 , Al 2 O 3 , ZrO 2 , ErA lx O y , YO x F y , YA lx O y , YZr x O y and YZr x Al y O z . The diffusion barrier layer and the erosion resistant layer may be deposited on the articles surface using a thin film deposition technique including but not limited to, ALD, PVD, and CVD. |