| abstract |
[Problem] To reduce a footprint while keeping a maintenance area. [Solution] The present invention comprises the following: a first processing module having a first processing container where a substrate is processed; a second processing module having a second processing container where the substrate is processed and which is disposed adjacent to the first processing container; a first exhaust box disposed adjacent to a rear surface of the first processing module and having housed therein a first exhaust system for exhausting the inside of the first processing container; a first supply box disposed on a side of the first exhaust box opposite the side adjacent to the rear surface of the first processing module, the first supply box having housed therein a first supply system for supplying a processing gas to the inside of the first processing container; a second exhaust box disposed adjacent to a rear surface of the second processing module and having stored therein a second exhaust system for exhausting the inside of the second processing container; and a second supply box disposed on a side of the second exhaust box opposite the side adjacent to the rear surface of the second processing module, the second supply box having housed therein a second supply system for supplying a processing gas to the inside of the second processing container. The first exhaust box is disposed on an outer corner of the rear surface of the first processing module on a side opposite the second processing module side, and the second exhaust box is disposed on an outer corner of the rear surface of the second processing module on a side opposite the first processing module side. |