| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02W30-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-296
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C2222-20 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65D85-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-5004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6704
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2017-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_915db45e57449c04f88d6eacff020113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14f2920daf72dbbbcf1f05aa7026dcfe |
| publicationDate |
2017-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2017217320-A1 |
| titleOfInvention |
Container in which liquid composition is contained and method for storing liquid composition |
| abstract |
One purpose of the present invention is to provide a container in which a liquid composition is contained, said liquid composition being used for the purpose of surface modification such as imparting of water repellency in the production process of a semiconductor device or the like, and a method for storing the liquid composition. This container in which a liquid composition is contained and this method for storing a liquid composition are suppressed in deterioration of the surface modification performance due to storage. Another purpose of the present invention is to provide: a container in which a liquid composition is contained and which exhibits excellent recyclability, said container being capable of suppressing deterioration of the surface modification performance due to storage even if repeatedly used as a container for the above-described liquid composition; and a method for storing a liquid composition.nA container according to one embodiment of the present invention is provided with a container part in which a liquid composition containing a surface treatment agent and an organic solvent having a moisture concentration of 400 ppm by mass or less is contained. At least a part of the inner wall of the container part, said part coming into contact with the liquid composition, has a contact angle θ with water of from 10 degrees to 150 degrees (inclusive). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112888641-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023136042-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022054620-A1 |
| priorityDate |
2016-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |