| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67276
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02299
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67259
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67346 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2017-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34bb038d6480b229aea2e0863a7157f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c34fe1b4f01b02c17b4aaee8e155f06 |
| publicationDate |
2017-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2017208982-A1 |
| titleOfInvention |
Substrate processing device, substrate processing method, program, and article manufacturing method |
| abstract |
A substrate processing device has: a first processing unit for performing a first process on a first substrate; a second processing unit for performing a second process on the first substrate on which the first process was performed; a determination unit for determining the timing for inputting a second substrate into the first processing unit, on the basis of the time required for the second process; and a change unit for giving a third substrate priority over the second substrate when a new processing request is received for processing the third substrate while waiting for input of the second substrate by the determined timing, and changing the processing order so as to input the third substrate into the first processing unit. |
| priorityDate |
2016-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |