abstract |
The present invention provides: an alloy for seed layers of Ni-based magnetic recording media, namely for seed layers of perpendicular magnetic recording media, which has a small crystal grain size; and a sputtering target material. Specifically, an Ni-based sputtering target material according to the present invention is formed of an Ni-Fe-Co-M alloy, and is characterized in that: the alloy contains, as M1 element, one or more elements selected from among Au, Ag, Pd, Rh, Ir, Ru, Re and Pt in a total amount of 2-20 at%, with the balance made up of Ni, Fe, Co and unavoidable impurities; and the content ratios of Ni, Fe and Co satisfy Ni:Fe:Co = 100-20:0-50:0-60 in terms of at% ratio. |