http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017175906-A1

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filingDate 2016-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0394b72cafb69fe81f5d9d43150c716
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publicationDate 2017-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2017175906-A1
titleOfInvention Carbon nanocoil-carbon microcoil hybrid material, and preparation method therefor
abstract The present invention relates to a carbon nanocoil-carbon microcoil hybrid material, and a preparation method therefor, the method comprising the steps of: arranging a ceramic substrate within a deposition chamber for carrying out thermal chemical vapor deposition; and injecting, into the deposition chamber, C 2 H 2 gas as a raw material gas and SF 6 gas as an additional gas, wherein the C 2 H 2 gas is injected during the entire deposition time and the SF 6 gas is injected by modulating between ON-OFF at least twice, thereby enabling the preparation of a carbon nanocoil-carbon microcoil hybrid material synthesized by artificially controlling the injection of SF 6 gas according to reaction time.
priorityDate 2016-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 28.