| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2035-0833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29L2031-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2033-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29L2011-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C35-0805
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D11-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D11-101
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D11-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-161
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D135-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 |
| filingDate |
2017-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4ccaf356da6f8c6ed8d980f79f39ff2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7013b426ebfc16645380cc0a58bcc4f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_198e601c60c434db2e9d3b90cc6d0385
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4a27a932caaa3821e0324178830105a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56c3813559509189f67d33d287585247 |
| publicationDate |
2017-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2017170128-A1 |
| titleOfInvention |
Pattern-forming method, method for producing processing substrate, method for producing optical component, method for producing circuit substrate, method for producing electronic component, and method for producing imprint mold |
| abstract |
A layer comprising a curable composition (A1) containing a polymerizable compound (a1) is formed on the surface of a substrate, liquid droplets comprising a curable composition (A2) containing a polymerizable compound (a2) are dropped in a discrete manner on the layer comprising the curable composition (A1), a mixed layer formed by the partial mixing of the curable composition (A1) and the curable composition (A2) is sandwiched between a mold and the substrate, the mixed layer is cured by irradiating the mixed layer with light from the mold side, and the mold is separated from the cured mixed layer, thereby forming a pattern of cured material on the substrate. The pattern of cured material is formed as a result of the above process with uniform precision in a plurality of shot regions on the substrate by setting the viscosity at 25℃ of a composition obtained by removing solvent from the curable composition (A1) to at least 40 mPa・s and less than 500 mPa・s, and by setting the viscosity at 25℃ of a composition obtained by removing solvent from the curable composition (A2) to at least 1 mPa・s and less than 40 mPa・s. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020059603-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018051961-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018051961-A1 |
| priorityDate |
2016-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |