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filingDate 2016-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2017-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2017116665-A1
titleOfInvention Manganese-containing film forming compositions, their synthesis, and use in film deposition
abstract Manganese-containing film forming compositions, their preparation, and their use for the vapor deposition of films are disclosed. The manganese-containing film forming compositions comprise silylamide-containing precursors, particularly {Mn[N(SiMe 2 Et) 2 ] 2 } 2 .
priorityDate 2015-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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