http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017115680-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d68514a32e3a53b7a0c77aabb87304b8 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate | 2016-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2647bda75b1f90414a1d20c4aface87 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14829ad3a8a2cfb2fe4c5536d3baf79f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9acc080d21f1d4cfb8029f19727e50fc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e88c98d683936db2b1ed115a5738c0d |
| publicationDate | 2017-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2017115680-A1 |
| titleOfInvention | Polymer, radiation-sensitive composition, compound, and method for manufacturing device |
| abstract | [Problem] The present invention addresses the problem of providing a radiation-sensitive composition having excellent LWR, CDU, and EL performance, and a compound and polymer used in the same. [Solution] A polymer having structural units (I) including a group represented by formula (1). (In formula (1): R 1 and R 2 are each independently any group selected from the group consisting of a straight-chain or branched C1-10 monovalent aliphatic hydrocarbon group which may be substituted, a C3-15 monovalent alicyclic hydrocarbon group which may be substituted, a group in which at least one methylene group of the aforementioned aliphatic hydrocarbon group or alicyclic hydrocarbon group is substituted with a divalent heteroatom-containing group, a C6-30 aromatic hydrocarbon group which may be substituted, and a C6-30 aromatic heterocyclic group which may be substituted; R 1 and R 2 are directly bonded to each other by a single bond, or may form a ring structure via any species selected from the group consisting of an oxygen atom, a sulfur atom, and a methylene group; R 3 is a C3-15 monovalent bridged alicyclic hydrocarbon group including at least any species selected from the group consisting of a lactone skeleton, a sultone skeleton, and a lactam skeleton which may be substituted; X is a single bond or a divalent linking group; and * represents a bonding site with the polymer main chain.) |
| priorityDate | 2015-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 95.