http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017110885-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1837840b0d7f1d216335a0331a4bd15a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3209 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-26 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2016-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9477e11d35aed0cd5124d956a37988b7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ca6f970000ceeb71a94849dcfadb360 |
| publicationDate | 2017-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2017110885-A1 |
| titleOfInvention | Cleaning agent composition for electronic material, cleaning agent stock solution, and method for cleaning electronic material |
| abstract | This cleaning agent composition for an electronic material includes water (B) and a tertiary amine (A) which is azeotropic with water, the boiling point of the tertiary amine (A) being 130-250°C at 1 atmosphere, and the weight ratio (%) of the tertiary amine (A) in the combined total of the tertiary amine (A) and the water (B) in the cleaning agent composition being equal to or less than the weight ratio of the tertiary amine (A) in an azeotropic mixture comprising the tertiary amine (A) and the water (B). Through the present invention, a cleaning agent composition for an electronic material, a stock solution of the cleaning agent composition, and a cleaning method including a step for cleaning an electronic material can be provided, whereby the cleaning agent composition is capable of removing particles adhering to an electronic material even when an extremely small amount (low concentration) of the cleaning agent composition is used, and also whereby no residue of the cleaning agent is left even when there is no rinsing step for washing off a cleaning agent component. |
| priorityDate | 2015-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 178.