http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017106575-A3

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publicationDate 2018-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2017106575-A3
titleOfInvention Integrated circuit containing does of ncem-enabled fill cells
abstract Wafers, chips, or dies that contain fill cells with structures configured to obtain in-line data via non-contact electrical measurements ("NCEM"). Such NCEM-enabled fill cells may target/expose a variety of open-circuit, short-circuit, leakage, or excessive resistance failure modes. Such wafers, chips, or dies may include Designs of Experiments ("DOEs"), comprised of multiple NCEM-enabled fill cells, in at least two variants, all targeted to the same failure mode(s).
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