| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1047 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2015-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf141e7474d900ebd5f530aed0606056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc53515b4dcaf917f38e1c175ee394ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5e6ce13ba3831a297fb2cb72315af8d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af6bf8eb778684259719b6b00ca323c6 |
| publicationDate |
2017-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2017105447-A1 |
| titleOfInvention |
Methods and apparatuses to provide ordered porosity |
| abstract |
A directed self-assembly (DSA) layer is deposited on one or more conductive features on an insulating layer on a substrate. The DSA layer comprises one or more first structures that are deposited on the insulating layer. One or more openings in the insulating layer are formed using the DSA layer as a mask to provide porosity for the insulating material. The one or more openings are self-aligned to the one or more conductive features. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11594451-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019183035-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10923394-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11456212-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10886173-B2 |
| priorityDate |
2015-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |