| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6409e25ad5decbd043ed7439fbf842ed |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2009-155
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0422 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-172
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-5438
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-175 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02 |
| filingDate |
2016-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c16bed343837824859b28059900d831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_500101a9785ff694787c464c5158e34c |
| publicationDate |
2017-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2017087929-A1 |
| titleOfInvention |
Acoustic resonator with reduced mechanical clamping of an active region for enhanced shear mode response |
| abstract |
The present disclosure provides an acoustic resonator with reduced mechanical clamping of an active region for enhanced shear mode response. More specifically, the present disclosure provides a solidly mounted BAW resonator device with an active region of piezoelectric material laterally surrounded by an inactive region with a reduced thickness of piezoelectric material such that at least an upper portion of the inactive region along a boundary of the active region is devoid of piezoelectric material. The resonator device provides a discontinuity along opposing lateral edges of the piezoelectric material of the active region to reduce mechanical clamping of the active region in a direction of maximum lateral displacement in shear mode operation. Increasing the mechanical isolation of the active region of piezoelectric material decreases mechanical damping of lateral vibrations of the active region which enhances the shear mode response for quasi-shear mode sensing. |
| priorityDate |
2015-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |