| abstract |
A corrosion-resistant component (100) configured for use with a semiconductor processing reactor, the corrosion-resistant component comprising: a) a ceramic insulating substrate(110); and, b) a corrosion-resistant non-porous layer (120) associated with the ceramic insulating substrate, the corrosion-resistant non-porous layer having a composition comprising at least 15% by weight of a rare earth compound based on total weight of the corrosion-resistant non-porous layer; and, the corrosion-resistant non-porous layer characterized by a microstructure substantially devoid of microcracks and fissures, and having an average grain size of at least about 100 nm and at most about 100 μm. Assemblies including corrosion-resistant components and methods of making are also disclosed. |