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publicationDate 2017-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2017074800-A1
titleOfInvention Tungsten-processing slurry with cationic surfactant and cyclodextrin
abstract Described are chemical-mechanical polishing compositions (e.g., slurries) and methods of using the slurries for chemical-mechanical polishing (or planarizing) a surface of a substrate that contains tungsten, the compositions containing cationic surfactant and cyclodextrin.
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