Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_10cfc10171f0e204339e96e62a544ce0 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
filingDate |
2016-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54e4c5bb230bf00624326b5d5b167244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_163ecc8bd0bd19d003c839f828fb3d2e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c67a2aaf04f79fe6a17b2ad405d34bce http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_550f9f19db0de6d3c97cc15a830c6b08 |
publicationDate |
2017-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2017069253-A1 |
titleOfInvention |
Polishing composition |
abstract |
Provided is a polishing composition that can suppress surface defects and reduce haze. A polishing composition that includes: abrasive grains; at least one type of water-soluble polymer selected from among vinyl-alcohol-based resins that have a 1,2-diol structural unit; a polyhydric alcohol; and an alkali compound. The polishing compound ideally also includes a non-ionic surfactant. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7361467-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7158280-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020107838-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020100778-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020137278-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019117904-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019131448-A1 |
priorityDate |
2015-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |