| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_26ae58436504f6b8c71dfac128a0a738 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-30455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3132
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-30472
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2482 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3053 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305 |
| filingDate |
2016-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3576ed6accddc9ed7660503b47802d6e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bbfc73dc87931f27686cd1759a67a26 |
| publicationDate |
2017-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2017063642-A1 |
| titleOfInvention |
Method for determining the changing location of the point of incidence of an energetic beam on a delimited surface |
| abstract |
In order to evaporate material, an electron beam is guided over a melt surface in a periodic pattern by means of a deflecting unit. Whether or not the actual pattern matches the target pattern specified by the deflecting unit is detected in principle on an image of the melt surface. In order to allow a better analysis of the image, the invention takes into consideration the periodicity of the deflection pattern during the analysis of temporally successive images. |
| priorityDate |
2015-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |