| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76885 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate |
2015-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af058c23dbaffba8acfbd8e8efe2317c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_307f3ae33c0c53b5b839b0da66cc48b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_316253f6352d0bd98047a5e38ce1b127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a3414f87a8c252fe703868a18c3547f |
| publicationDate |
2017-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2017052559-A1 |
| titleOfInvention |
Methods, apparatuses and systems for integrated circuit structures with a replacement inter-layer dielectric (ild) |
| abstract |
Embodiments of the present disclosure describe techniques and configurations associated with an integrated circuit (IC) structure with a replacement inter-layer dielectric (ILD) layer disposed on a first ILD layer. A sacrificial layer may be formed on the first ILD layer. Trenches may be patterned and formed in the sacrificial layer such that the trenches are disposed on the first ILD layer. Vias may be patterned and formed in the first ILD layer below the trenches. After formation of the trenches, the sacrificial layer may be removed, and the replacement ILD layer (e.g., a second ILD layer) may be formed on the first ILD layer between the trenches. Other embodiments may be described and/or claimed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11430735-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11158537-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-116364658-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-116364658-A |
| priorityDate |
2015-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |