| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0d8ba7cf297999b7b22481272a6dfb67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1f5a440bd78a778f03a4b9d3fdc75ea6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24ff4cc06b76dc060097cbc0f6010434 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-883
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-546
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2443 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 |
| filingDate |
2015-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05e04d8418e47953dd1eebc2b2933e77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35c5b4b0d1e12eab80cd9596661cef97
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80148b790a0e13240040983f085d3831 |
| publicationDate |
2017-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2017050355-A1 |
| titleOfInvention |
Diffusion barrier for oscillation crystals, measurement assembly for measuring a deposition rate and method thereof |
| abstract |
A detection element for a measurement assembly adapted to measure a deposition rate of an evaporated material on a substrate. The detection element comprising: an oscillation crystal for detecting the deposition rate; and a barrier layer comprising a barrier material covering at least a portion of the oscillation crystal configured to prevent the evaporated material from diffusing into the oscillation crystal. |
| priorityDate |
2015-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |