| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_97e705fa0022c85763b090ae72c31ec2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_132435e46cf3d954e74d0e7cc7fe3ad1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C39-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C39-17 |
| filingDate |
2016-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da1466535d2096f7fc704894ec32d33e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bcc341b74ed1e93feac8b9676b37a38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6813012f70899384ae7fb1e64d640155
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_986d195b53f83e3b72d89adf240c7951 |
| publicationDate |
2017-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2017026377-A1 |
| titleOfInvention |
Cyclic compound, method for producing same, photoresist composition including said cyclic compound and method for producing same, and resist pattern formation method using said composition |
| abstract |
Provided are: a cyclic compound which is useful as a photoresist material for forming a chemically amplified resist useful in microfabrication, has high solubility with respect to a safety solvent, has high sensitivity, has small roughness, and gives a good resist pattern shape; a method for producing same; a photoresist composition including said cyclic compound and a method for producing same; and a resist pattern forming method using said composition. Said cyclic compound is characterized by features shown in general formula (1). |
| priorityDate |
2015-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |