http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017014438-A1

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filingDate 2016-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25f01fe3350196aba1c52d54673ee0db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32f90d4b3b188706e81cadd53f8e99ff
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2662d6e283c9f031d9a8356291c015bd
publicationDate 2017-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2017014438-A1
titleOfInvention Negative photoresist composition for krf laser for forming semiconductor patterns
abstract The present invention relates to a negative photoresist composition for a KrF laser for forming semiconductor patterns and, more specifically, provides a negative photoresist composition for a KrF laser, the composition, which is suitable to be applied to a semiconductor process, including a specific compound in order to improve a property of a conventional negative photoresist, thereby having high transparency even in a short-wavelength exposure light source, compared to that of the conventional negative photoresist, and simultaneously having a high resolution and an excellent profile.
priorityDate 2015-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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