http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016201320-A1

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filingDate 2016-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8243055182613836b86a0587700d46f4
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publicationDate 2016-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2016201320-A1
titleOfInvention Vapor deposition processes for forming silicon- and nitrogen-containing thin films
abstract ALD processes for forming the silicon and oxygen containing films using mono-substituted TSA precursors are disclosed. The mono-substituted TSA precursors have the formula: (SiH3)2N-SiH2-X, wherein X is a halogen atom or an amino group.
priorityDate 2015-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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