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publicationDate 2016-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2016186573-A1
titleOfInvention Apparatus and methods for investigating a sample surface
abstract An apparatus for investigating a sample surface is disclosed. The apparatus comprises: a probe array comprising a substrate and a plurality of probe tips extending from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface; an actuator configured to move the probe array towards the sample surface; a light source configured to illuminate the probe tips with an illumination through the substrate; and an image capture device arranged to detect a change in intensity of the illumination reflected from the probe tips.
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