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filingDate 2016-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_787d3dcf7fa1cbaa925a1c50b4d06d8f
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publicationDate 2016-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2016161067-A1
titleOfInvention Double-deprotected chemically amplified photoresists
abstract There are disclosed compositions requiring two acid-catalyzed steps for deprotection. The compositions are of formula I or formula II. Also disclosed are polymers formed from these compositions, and methods of using these compositions in, for example,photolithography.
priorityDate 2015-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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