http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016156607-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_244aca1ab1656c43d5140882ddce0939 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65G21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67313 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67346 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-673 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2016-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_440d012170676886a81ab8e2c59e70a9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f9fa70753be9c32f9747db1753e85b7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3ca39c363eb318349f06ead6652127f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9f9c77930cb08107030c61d0f54bbd3 |
| publicationDate | 2016-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2016156607-A1 |
| titleOfInvention | Wafer boat and plasma treatment device for wafers |
| abstract | Wafer boats for plasma treatment of disk-shaped wafers, in particular, semiconductor wafers for semiconductor or photovoltaic applications, and a plasma treatment device for wafers are described. A wafer boat has a plurality of first receiving elements arranged parallel to one another, which each have a plurality of receiving slots for receiving an edge region of a wafer or of a wafer pair, as well as a plurality of second receiving elements arranged parallel to one another which are each electrically conductive and have at least one depression for receiving an edge region of at least one wafer or one wafer pair. An alternative wafer boat has a plurality of electrically-conductive, plate-shaped receiving elements arranged parallel to one another which have a height that is less than half of the height of the wafers to be received, wherein the receiving elements each have at least three receiving elements on the opposing sides for receiving wafers. The wafer boats can be received in the processing chamber of the plasma treatment device, which has means for controlling or monitoring a process gas atmosphere in the processing chamber and at least one power source which can be connected to the electrically-conductive receiving elements of the wafer boat in a suitable way in order to apply an electrical voltage between directly adjacent wafers received in the wafer boat. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200006059-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190061049-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102266829-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102195596-B1 |
| priorityDate | 2015-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.