| abstract |
This sintering material comprises granules, has a tapped apparent density of 1.0-2.5g/cm 3 , has a cumulative volume particle diameter of 10-100μm at a cumulative volume of 50vol% as measured by laser diffraction/scattering particle size distribution measurement before ultrasonic dispersion processing, and has a cumulative volume particle diameter of 0.1-1.5μm at a cumulative volume of 50vol% as measured by laser diffraction/scattering particle size distribution measurement after ultrasonic dispersion processing at 300W for 15 minutes. The sintering material is a rare earth metal oxyfluoride of which the maximum peak observed at 2θ=20°-40°, as measured by X-ray diffraction using Cu-Kα rays or Cu-Kα 1 rays, is in the form LnOF. |