| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_449bbbdf965dea4c505a9d5897e38c86 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F26B25-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
2016-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be169b32411850f2f61afdfa280dbdfc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ab63739336e6f696167205272765d67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f7db21a9e1de7839ec63f21fc55f3a0 |
| publicationDate |
2016-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2016132029-A1 |
| titleOfInvention |
Method for stabilizing a substrate and machine for implementing same |
| abstract |
The present invention relates to a method for treating a substrate (23) comprising a doping step immediately followed by a stabilization step. The method is characterized in that said stabilization step involves immersing the substrate in a gas belonging to the group comprising oxygen, water vapor, moist air, hydrogen peroxide vapor, ozone and ammonia. The invention further relates to a machine for treating a substrate according to the aforementioned method and comprising a gas inlet. |
| priorityDate |
2015-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |