| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9cb217f83556ce2a418344c2d485415 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-36 |
| filingDate |
2016-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcefe1bb4a1c71461d704d1691e43483
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33e089881ea9874599e16fe6c4fd9656 |
| publicationDate |
2016-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2016114157-A1 |
| titleOfInvention |
Method for manufacturing metal carbonitride film or metalloid carbonitride film, metal carbonitride film or metalloid carbonitride film, and apparatus for manufacturing metal carbonitride film or metalloid carbonitride film |
| abstract |
Provided is a method with which a metal carbonitride film or metalloid carbonitride film can be manufactured at low temperature. A metal carbonitride film or metalloid carbonitride film is formed using a N-trialkylsilyl-1,2,3-triazole compound and/or a 1,2,4-triazole compound represented by general formula (1) as a nitrogen source. (In the formula, R can be the same or different and represents a hydrogen atom, a C1 to C5 straight, branched or cyclic alkyl group, or C1 to C5 trialkylsilyl group. The multiple Rs can also bond to each other to form a ring.) |
| priorityDate |
2015-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |