| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dd9d7244d3e219a2468588fc40a3b2df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5c121269689cbab9b3a4548b15caf3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-2003 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J35-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J37-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2015-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14e0f4460edf76ee35f0a948e248806b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b92d12708f031d6862691304062db23a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e253cc8130bd897ef7a4fafdb27f8d54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_71450f1d2f31170b496ac636f34e6f1c |
| publicationDate |
2016-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2016108284-A1 |
| titleOfInvention |
Planarizing method and planarizing device |
| abstract |
[Purpose] To make a device compact while realizing precise planarizing, and to prevent the risk of breakage in a workpiece during working. [Solution] The prevent invention is provided with a holder (8), a driving motor (101), a supporting substrate (4), a reciprocal driving mechanism (5), and a driving cylinder (102). The holder (8) holds the rear surface of a substrate workpiece (7). The driving motor (101) rotates the substrate workpiece (7) around an axis that intersects the front surface of the substrate workpiece (7) within the front surface. The supporting substrate (4) holds a pad (6) and positions the front surface thereof to face the front surface of the substrate workpiece (7). The reciprocal driving mechanism (5) reciprocally moves the supporting substrate (4) in a direction parallel to the front surface of the pad (6) to at least an extent that flattening by a catalytic reaction becomes possible. The driving cylinder (102) advances the holder (8) in a direction intersecting the front surface of the pad (6) so as to bring the front surface of the substrate workpiece (7) and the front surface of the pad (6) into contact against each other or close to each other. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111015504-A |
| priorityDate |
2014-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |