| abstract |
The invention relates to a sensor (10) for detecting electrically conductive and/or polarizable particles, in particular for detecting soot particles (30), comprising a substrate (11) and at least two electrode layers (12; 13), a first electrode layer (12) and at least one second electrode layer (13), which is arranged between the substrate (11) and the first electrode layer (12), being provided. At least one insulation layer (14) is formed between the first electrode layer (12) and the at least one second electrode layer (13) and at least one opening (15; 16) is formed in both the first electrode layer (12) and the at least one insulation layer (14), at least some sections of the opening (15) in the first electrode layer (12) and of the opening (16) in the insulation layer (14) being arranged one above the other, such that at least one passage (17, 17', 17'') is formed to the second electrode layer (13). |