| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2015-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c35e38651f4b8c39bcf3dd46602f6fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b61b19455e34e18409d6a5b662d628f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92aca6788fe723ec21c500d54aa7aadf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b96710ee5e4982b3889de2b8431e6fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2df8c09c4c5839d2075d6a9942a854ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09f17ac8e8686682daa26a3fe9e312c8 |
| publicationDate |
2016-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2016100394-A1 |
| titleOfInvention |
Monitoring system for deposition and method of operation thereof |
| abstract |
A monitoring and deposition control system and method of operation thereof including: a deposition chamber for depositing a material layer on a substrate; a sensor array for monitoring deposition of the material layer for changes in a layer thickness of the material layer during deposition; and a processing unit for adjusting deposition parameters based on the changes in the layer thickness during deposition. |
| priorityDate |
2014-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |