http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016096946-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c8401bd1a86a10d5508942a53475fc38 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68764 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68721 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-004 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-00 |
| filingDate | 2015-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f17be52a1c2aa053bf25fcfc3580fce3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6233d313e768c286e068c50a945d3b63 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce744421731b01486d47b41e7aaacba1 |
| publicationDate | 2016-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2016096946-A1 |
| titleOfInvention | Substrate holder for vertical galvanic metal deposition |
| abstract | The present invention is related to a substrate holder for vertical galvanic metal, preferably copper, deposition on a substrate to be treated comprising a first substrate holder part and a second substrate holder part, wherein both substrate holder parts comprise an inner metal comprising part and an outer non-metallic part characterized in that the substrate holder further comprises i) At least one hanging element in each substrate holder part for mechanically connecting the substrate holder to a treatment container, ii) At least one first sealing element in each substrate holder part arranged between the substrate to be treated and the respective substrate holder part, iii) At least one second sealing element for the entire substrate holder arranged between the inner metal comprising part of the substrate holder and the outer non-metallic part of the substrate holder, iv) At least one fastening system for detachably fastening both substrate holder parts to each other for holding the substrate to be treated, v) At least one first contact element in each substrate holder part for forwarding current from an outer source through the hanging element to the at least second contact element, and vi) At least one second contact element in each substrate holder part for forwarding current from the at least first contact element to the substrate to be treated. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3376530-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018068983-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3309279-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018166757-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10832929-B2 |
| priorityDate | 2014-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.